02/10/2021
X-ray Photoelectron spectroscopy Laboratory
Model: PHI 5000 VERSA PROBE III
Manufacturer: ULVAC PHI(Physical Electronics), USA
XPS source: Monochromatic Al X-Ray Source with focused beam(< 10µm to 300 µm) for rapid X-ray induced Secondary electron Imagining (SXI)
Analyzer: A 180 degree hemispherical electron energy analyzer supported with 128 channel detector
Argon Gun:0-5V argon ion gun for effective specimen cleaning depth profiling and charge neutralization
Sample heating & cooling: 800 degree Celsius to -140 degree Celsius
Gas Cluster Ion Source(GCIB):2.5 to 20 kV Ar GCIB Gun for low damage surface cleaning
Ultraviolet Photoelectric Spectroscopy Source
Reflected Electron Energy Loss Spectroscopy (REELS)
Dual Anode: Magnesium and Zirconium twin anodes
